University of Missouri Ionwave #27-0052

University of Missouri seeks one ALD system for Missouri S&T’s cleanroom program

The University of Missouri is seeking one ALD system for Missouri S&T’s semiconductor engineering cleanroom program. - Government buyer: University of Missouri; sub-agency: Missouri S&T; office: UM Procurement. The system is for use in Rolla, Missouri. - OEMs and vendors: No manufacturer, OEM, or vendor is named in the opportunity. - Requested product: One Atomic Layer Deposition (ALD) system; no part number is specified. - Support coupon substrates from 1 cm × 1 cm through 6-inch wafers, thermal ALD, remote plasma PEALD, and a loadlock. - Include six precursor sources, including titanium, hafnium, and aluminum precursors; heated precursor bubblers and delivery lines; H2O oxidant; O2 plasma; and N2, O2, Ar, and H2O process gases. - Provide initial recipes for Al2O3, HfO2, SiO2, TiO2, TiN, and AlN; wafer temperature capability preferably from room temperature to 400°C or higher; and a pump and foreline. - Include a 24-month warranty. Detailed system literature and specifications are requested. - Other listed items and services: Software/hardware if applicable; optional maintenance/service agreement with service details; training and installation if applicable; and shipping/freight, including applicable tariffs, duties, and fees. - Term: Two years from award, with firm pricing during the initial term.

Description

The University of Missouri requests bids for the furnishing and delivery of one Atomic Layer Deposition System for use in undergraduate courses in Missouri S&T’s new cleanroom and Semiconductor Engineering bachelor’s degree program. Requested capabilities include thermal ALD and remote plasma PEALD, a loadlock, six precursor sources, specified deposition recipes, and wafer processing from coupon pieces through 6-inch wafers. The solicitation also lists optional bid lines for software or hardware, maintenance or service, training, installation, shipping, and a discount. The contract period is two years from award, and the system must include a 24-month warranty.

View original listing