# University of Missouri Ionwave #27-0052

University of Missouri seeks one ALD system for Missouri S&T’s cleanroom program

**Posted:** October 20, 2026
**Respond By:** November 03, 2026
**Identifier:** 27-0052
**NAICS:** 423490

The University of Missouri is seeking one ALD system for Missouri S&T’s semiconductor engineering cleanroom program.
- **Government buyer:** University of Missouri; sub-agency: Missouri S&T; office: UM Procurement. The system is for use in Rolla, Missouri.
- **OEMs and vendors:** No manufacturer, OEM, or vendor is named in the opportunity.
- **Requested product:** One Atomic Layer Deposition (ALD) system; no part number is specified.
  - Support coupon substrates from 1 cm × 1 cm through 6-inch wafers, thermal ALD, remote plasma PEALD, and a loadlock.
  - Include six precursor sources, including titanium, hafnium, and aluminum precursors; heated precursor bubblers and delivery lines; H2O oxidant; O2 plasma; and N2, O2, Ar, and H2O process gases.
  - Provide initial recipes for Al2O3, HfO2, SiO2, TiO2, TiN, and AlN; wafer temperature capability preferably from room temperature to 400°C or higher; and a pump and foreline.
  - Include a 24-month warranty. Detailed system literature and specifications are requested.
- **Other listed items and services:** Software/hardware if applicable; optional maintenance/service agreement with service details; training and installation if applicable; and shipping/freight, including applicable tariffs, duties, and fees.
- **Term:** Two years from award, with firm pricing during the initial term.

### Description

The University of Missouri requests bids for the furnishing and delivery of one Atomic Layer Deposition System for use in undergraduate courses in Missouri S&T’s new cleanroom and Semiconductor Engineering bachelor’s degree program. Requested capabilities include thermal ALD and remote plasma PEALD, a loadlock, six precursor sources, specified deposition recipes, and wafer processing from coupon pieces through 6-inch wafers. The solicitation also lists optional bid lines for software or hardware, maintenance or service, training, installation, shipping, and a discount. The contract period is two years from award, and the system must include a 24-month warranty.

[View original listing](https://umsystembids.ionwave.net/PublicDetail.aspx?bidID=1055&SourceType=1)