University of Wisconsin SCIQuest #2027-UWMSN-01480-RFB

PECVD and ICP-RIE systems for the University of Wisconsin–Madison Nanoscale Fabrication Center

The University of Wisconsin–Madison is seeking two semiconductor fabrication systems for its Nanoscale Fabrication Center. - Government buyer: University of Wisconsin–Madison, Purchasing Services Department, for the Wisconsin Center for Nanotechnology’s Nanoscale Fabrication Center. Buyer contact: Eric Thompson. - Equipment requested: One plasma-enhanced chemical vapor deposition (PECVD) system and one inductively coupled plasma reactive ion etching (ICP-RIE) system. - OEMs and vendors: No equipment OEMs, brands, vendors, models, or part numbers are named in the available materials. - Requirements: Technical specifications are referenced in a separate Terms and Requirements document and are not included in the available summaries. - Period of performance: Not specified.

Description

The University of Wisconsin-Madison is requesting bids for the purchase of a plasma-enhanced chemical vapor deposition (PECVD) system and an inductively coupled plasma reactive ion etching (ICP-RIE) system. The procurement is on behalf of the Wisconsin Center for Nanotechnology's Nanoscale Fabrication Center. Bids must be submitted electronically through the ShopUW+ Sourcing Event Module by October 23, 2026, at 2:00 PM CDT. Specific bid information is in the Terms and Requirements document referenced in the buyer attachments.

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