# University of Wisconsin SCIQuest #2027-UWMSN-01480-RFB

PECVD and ICP-RIE systems for the University of Wisconsin–Madison Nanoscale Fabrication Center

**Posted:** October 12, 2026
**Respond By:** October 23, 2026
**Identifier:** 2027-UWMSN-01480-RFB
**NAICS:** 423690

The University of Wisconsin–Madison is seeking two semiconductor fabrication systems for its Nanoscale Fabrication Center.
- **Government buyer:** University of Wisconsin–Madison, Purchasing Services Department, for the Wisconsin Center for Nanotechnology’s Nanoscale Fabrication Center. Buyer contact: Eric Thompson.
- **Equipment requested:** One plasma-enhanced chemical vapor deposition (PECVD) system and one inductively coupled plasma reactive ion etching (ICP-RIE) system.
- **OEMs and vendors:** No equipment OEMs, brands, vendors, models, or part numbers are named in the available materials.
- **Requirements:** Technical specifications are referenced in a separate Terms and Requirements document and are not included in the available summaries.
- **Period of performance:** Not specified.

### Description

The University of Wisconsin-Madison is requesting bids for the purchase of a plasma-enhanced chemical vapor deposition (PECVD) system and an inductively coupled plasma reactive ion etching (ICP-RIE) system. The procurement is on behalf of the Wisconsin Center for Nanotechnology's Nanoscale Fabrication Center. Bids must be submitted electronically through the ShopUW+ Sourcing Event Module by October 23, 2026, at 2:00 PM CDT. Specific bid information is in the Terms and Requirements document referenced in the buyer attachments.

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