SAM #NIST-SS27-01

NIST sources sought for a cleanroom microscope system

NIST is seeking information on a microscope system for its Boulder Microfabrication Facility’s cleanroom inspection work. - Government buyer: U.S. Department of Commerce, National Institute of Standards and Technology (NIST), Boulder Microfabrication Facility (BMF); the Acquisition Management Division issued the notice. - OEMs and vendors: No microscope manufacturers, OEMs, or commercial vendors are identified in the provided materials. - Product requested: - One microscope system; quantity and part number are not specified. - For semiconductor-device inspection in an ISO Class 5 cleanroom. - Must provide 200 mm travel in both X and Y, manual and computer-controlled operation, and 25x–1000x magnification. - A multi-objective turret is required, preferably with six positions; camera and software must support publication-quality images and integrated control and image analysis. - Imaging capabilities must include transmission, reflection, darkfield, DIC (Nomarski), and yellow-light modes, with multiple filters. - Must fit on a 3 ft by 3 ft tabletop and be compatible in weight with a pneumatic floating table. - Notable: The notice is a sources-sought request for information; no specific microscope model or contract value is provided.

Description

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