Alberta Purchasing #2026RSS0083

University of Calgary seeks Heidelberg Instruments MLA 150 maskless aligner

The University of Calgary’s qLab is seeking a maskless lithography system for semiconductor cleanroom and quantum-device fabrication. - Government buyer: University of Calgary, qLab. - OEM: Heidelberg Instruments, manufacturer of the requested MLA 150 system. - Vendor: Spectra Research Corporation, identified as Heidelberg Instruments’ sole authorized Canadian representative. - Product requested: One Heidelberg Instruments MLA 150 maskless aligner system; quantity is not specified, and no part number is provided. - Key capabilities: Minimum feature size of 1 μm; 405 nm and 375 nm laser wavelengths; real-time autofocus for transparent, patterned, warped, or delicate substrates; throughput suitable for cleanroom use; and support for varied substrates, including diamond. - Notable requirement: The notice identifies the MLA 150 as the only known system meeting the stated functional and technical requirements.

Description

The University of Calgary intends to purchase an MLA 150 System from Spectra Research Corporation, identified in the source as the sole authorized Canadian representative of Heidelberg Instruments for this system. The system is required for qLab multi-user semiconductor cleanroom operations and fabrication of quantum devices on various substrates, including transparent and challenging materials such as diamond. Required capabilities include maskless lithography with a minimum feature size of 1 μm, 405 nm and 375 nm laser wavelengths, real-time autofocus, and sufficient cleanroom throughput. The source states that the MLA 150 is the only system known to meet these requirements and identifies the notice as a direct award.

View original listing