CanadaBuys #AB-2026-06619

University of Calgary qLab Request for an MLA 150 Maskless Aligner System

The University of Calgary’s qLab is seeking a maskless lithography system for cleanroom and quantum-device fabrication. - Government buyer: University of Calgary, for qLab. - OEM: Heidelberg Instruments, manufacturer of the requested MLA 150 system. - Vendor/representative: Spectra Research Corporation is identified as Heidelberg Instruments’ sole authorized Canadian representative. - Product: One MLA 150 Maskless Aligner System; no part number or quantity beyond the single system is specified. - Key requirements: Minimum 1 μm feature size; 405 nm and 375 nm laser wavelengths; real-time autofocus for transparent, patterned, warped, or delicate substrates; cleanroom-appropriate throughput; and support for semiconductor and quantum-device fabrication on substrates including diamond. - Notable procurement detail: The notice states that the MLA 150 is the only known system assessed as meeting the stated requirements.

Description

The University of Calgary intends to purchase the MLA 150 Maskless Aligner System from Spectra Research Corporation, identified as the sole authorized Canadian representative for the system. UCalgary’s qLab requires a direct-write maskless lithography system for multi-user semiconductor cleanroom operations and fabrication of quantum devices on a range of substrates, including diamond. Required capabilities include a minimum feature size of 1 μm, dual 405 nm and 375 nm laser wavelengths, real-time autofocus for various substrate types, and sufficient cleanroom throughput. The notice states that the MLA 150 is the only known system assessed as meeting these requirements.

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