SAM #1333ND26QNB640573

NIST Solicitation for Semiconductor Process Residual Gas Analyzer (RGA)

NIST's Chemical Process and Nuclear Measurements Group is procuring a semiconductor-grade Process Residual Gas Analyzer (RGA) for advanced R&D in semiconductor manufacturing. - Government Buyer: - National Institute of Standards and Technology (NIST), Chemical Process and Nuclear Measurements Group - Acquisition Management Division, 100 Bureau Drive Stop 1640, Building 301 Room B129, Gaithersburg, MD - Products Requested: - One new Semiconductor Process Residual Gas Analyzer (RGA) - Must include shipping and handling - Detailed technical specifications: - Mass spectrometer with closed ion source, quadrupole mass filter, tungsten filament - Mass range: 1-200 amu - Detectors: Faraday cup and electron multiplier - Detection limit: <50 ppb - Heated components and automated bakeout - Sampling system compatible with corrosive precursors (organometallic and metal halide) - Built-in calibration gas source - Chemically resistant pumping system - Recipe-based software compatible with Windows 11 - Ethernet communications and integrated control electronics - Physical dimensions: <9" W x 16" H x 24" D; weight <35 lb - Includes operating and software manuals - OEMs and Vendors: - No specific OEMs or brands named; open to all qualified manufacturers - Unique Requirements: - Compatibility with low-volatility organometallic and metal halide precursors - Use as an online process diagnostic tool for flow systems and ALD reactor - Supports CHIPS R&D Metrology program for process optimization and digital twin development - Delivery required within 16 weeks of award; minimum one-year warranty upon acceptance - Competition: - Full and Open Competition under NAICS 334516 (Analytical Laboratory Instrument Manufacturing) - Estimated Contract Value: - Typical for specialized analytical equipment: $50,000 - $150,000

Description

SOLICITATION 1333ND26QNB640573

Semiconductor Process Residual Gas Analyzer

This is a solicitation for commercial items prepared in accordance with the format in RFO Subpart 12.2, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotations are being requested, and a separate written document will not be issued.

This solicitation is a Request for Quotation (RFQ).

The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 – Analytical Laboratory Instrument Manufacturing with a Small Business size standard of 1,000 Employees. This requirement will be a Full and Open Competition.

The Chemical Process and Nuclear Measurements Group is seeking a semiconductor-grade Process Residual Gas Analyzer (RGA) for use on flow systems, including an ALD reactor, as part of a CHIPS R&D Metrology program. This program focuses on developing digital twin technology for semiconductor manufacturing equipment. The flow systems, equipped with in situ and inline sensors, are used to acquire process data on thin film growth characterization. The RGA will serve as an online process diagnostic. The RGA must be compatible with low-volatility organometallic and metal halide precursors and process gases. The data and models generated by this project will lead to improvements in process optimization and control, ultimately resulting in cost savings for the US semiconductor industry.

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