SAM #NIST-SSN-26-3002508

NIST Requests UHV Translation Stages, Controllers, and Feedthrough Flanges for EUV Metrology

NIST, part of the Department of Commerce, is seeking industry input for specialized equipment to support advanced optical metrology for EUV generation. - Government Buyer: - National Institute of Standards and Technology (NIST) - Synchrotron Ultraviolet Research Facility (SURF III) - Products Requested: - 10 Ultra-High Vacuum (UHV) translation stages - Must use low-outgassing materials, stainless steel hardware, piezo-electric actuators, crossed roller bearings - Compact size (<20 mm thick, 85 mm long, 50 mm wide), closed loop operation with encoder resolution <10 μm - 2 m minimum in-vacuum cable, 1 kg load capacity, UHV ready for 10⁻⁸ Torr base pressure - 10 Motion controller/amplifier units (including power supplies) - Capable of controlling multiple axes, Ethernet communication, LabView programming library - Includes all power, motor, and communication cables, vacuum interface cabling with 15-pin D-sub connectors, adapters for air operation - 2 6-inch CFF electrical feedthrough flanges - DN100CF knife edge flange, non-rotatable, UHV vacuum rated (10⁻⁸ Torr or better) - Each flange supports 8 axes motor control, includes 8 15-pin D-sub feedthroughs - Unique Requirements: - All equipment must be UHV compatible, cleaned and packaged for UHV operation - Respondents must provide product specifications, OEM names, country of manufacture, commercial pricing, and compliance information - Equipment supports advanced metrology for EUV scintillator characterization - No specific OEMs or vendors are mentioned; industry is invited to propose solutions meeting these requirements.

Description

Background The National Institute of Standards and Technology (NIST) is embarking on a project to support the Extreme Ultraviolet Lithography (EUVL) community by developing characterization of EUV scintillator materials. Many techniques for measuring spatial distribution (or image) of EUV rely on scintillators or devices that convert EUV radiation into visible light. Scintillators tend to be robust and afford the user the ability to use less costly and easier to characterize, visible light detection or imaging systems. However, their characterization requires specialized techniques and hardware which NIST must develop in order to provide accurate characterization of the performance of EUV scintillators. This requirement supports the “Optical Metrology for EUV Generation” Project under Grand Challenge 2, “Advanced Metrology for Future Microelectronics Manufacturing,” for CHIPS R&D Metrology. This requirement enables NIST to construct an ultra-high vacuum microscope to operate in NIST Synchrotron Ultraviolet Research Facility (SURF III) EUV reflectometer beamline. The microscope will allow for the measurement of EUV scintillator efficiency, output spectrum and point spread function. Minimum Capabilities that NIST Requires and for Which Information is Being Requested DRAFT MINIMUM REQUIREMENTS Description: UHV translation stages Quantity: 10 Technical Specifications Ultra-high vacuum compatible: low-outgassing materials, pressure range 10-8 Torr or better: Polyimide or PTFE insulated wire cables with braided, silver-plated copper shielding. All Stainless steel (18-8 or similar) hardware and plain finish materials (no anodization or paint). Stainless steel bearings lubricated with UHV-compatible lubricants (10-9 Torr or better rated at room temperature, no silicone-based lubricants) Vented holes or vented hardware used in unvented blind holes. Minimum bake out temperature 100°C. Travel Range: 50 mm minimum, 55 mm maximum Crossed roller bearing travel with piezo-electric actuator Compact size: < 20 mm thick, 85 mm long, 50 mm wide Closed loop operation: encoder resolution < 10 µm In vacuum cable length: 2 m (minimum) Vacuum interface cabling must use 15-pin D-sub connection and include connectors (PEEK material on vacuum side) Load capacity: 1 kg or more Stages must be cleaned for UHV compatibility, packaged and sealed to maintain cleanliness and be ready for 10-8 Torr base pressure operation with minimal cleaning (alcohol wipe). Description: Motion controller/amplifier Quantity: 10 Technical Specifications 2 units (5 axes each) to control all combined stages in line item 1 Include power supply for each unit: Electrical Requirements: Input Voltage: 120 VAC±10% (108--132 VAC) Frequency: 60 Hz±3 Hz Power Cord: Detachable 6+ ft line cord, IEC C13 to NEMA 5-15P plug Compliance: UL 62368-1 (or relevant IEEE/ANSI standard), FCC Part 15 Class A/B Controller to motor connector cable length: 2 m minimum Ethernet communication LabView programming library Include all power, motor and communication cables. Vacuum interface cabling must use 15-pin D-sub connection and include connectors. Include all required adapters to operate stages in air (w/o feedthrough flange). Description: 6” CFF electrical feed through flanges Quantity: 2 Technical Specifications Feedthrough flanges to support 8 axes per flange motor control operation in atmosphere and motor actuation in vacuum 6” CFF (DN100CF) knife edge flange platform, non-rotatable, clearance holes for sealing fasteners. UHV vacuum rated: pressure range 10-8 Torr or better. Quantity 2, 6” CFF with qty. 8, 15 pin D-dub feed throughs on each flange. Instructions for Responding to This Notice Parties that respond to this Notice are requested to submit the requested information via email in Microsoft Word, Adobe PDF, and/or Microsoft Excel format to the designated point(s) of contact whose name and email address appears at the bottom of this notice. Please provide only the information requested by this Notice, and do not include proprietary, classified, confidential, or sensitive information in a response to this Notice. The Government reserves the right to use information that it receives in response to this Notice as it deems appropriate to establish final requirements or for other legally appropriate purposes. Disclaimer: This Notice does not obligate the NIST to award a contract or otherwise pay respondents to this notice for information provided in response to this Notice. Following a review of the responses and market research, NIST may publish a solicitation on an authorized site, depending on the approved acquisition strategy. Responses received after the closing date for this Notice may not be considered.                                                                                                                              Information Requested in Response to This Notice: To help NIST with its market research, NIST is requesting that industry sources carefully review this notice and any attachments to it and voluntarily provide the following information: Company Summary Notice Identification: Notice ID and Title of this posting. Corporate Details: Company name, physical address, website address, and Unique Entity Identifier (UEI). Point of Contact (POC): Name, phone number, and email address. Company Size Standard: Your company’s size status relative to the NAICS code provided in this Notice. (Refer to the SBA Table of Small Business Size Standards). System for Award Management (SAM) Registration: Indicate whether your company has an active registration for procurement purposes in SAM.gov. Feedback for Draft Requirements Review the information included with this Notice, including any Attachment(s). Then, please provide suggestions to (a) improve clarity of it; (b) make it more competitive; (c) indicate whether there is anything that may inadvertently exclude domestically manufactured (made in the U.S.A.) end products from being considered; and (d) indicate if anything included with this Notice could potentially be revised to improve the ability for domestic (“Made in America”) end products to be considered; and (e) if a domestic end product is not currently available to meet the draft requirements/minimum specifications, please provide an estimated timeframe for when it may be domestically produced in the USA in the future if that appears to be likely. Information Regarding Commercial Products and Related Commercial Services Provide specifications, company name of the original equipment manufacturer, and the country of manufacture for commercial products and/or commercial services that your company is legally authorized to sell and that may meet NIST’s minimum requirements. Standard Commercial Pricing: Provide your company’s standard commercial pricing information for the requirements described in this Notice (including any Attachments) and explain what is included in those standard commercial prices. Estimated Price Range: You may provide an estimated price or estimated price range for the draft requirements included in this notice, including a brief explanation of how it was derived. Standard Commercial Terms and Conditions: Provide a copy of the standard commercial terms and conditions for the commercial products and/or commercial services identified in your company’s response to this Notice, including the nature and the duration of applicable standard commercial warranty(ies). Regulatory and Supply Chain Compliance Indicate whether your company could comply with RFO FAR clause 52.219-14 (Deviation JAN 2026) if this acquisition were to be set aside for small businesses (assuming that there is no waiver to the Nonmanufacturer Rule for the applicable NAICS code). Provide a brief supporting explanation. Existing Governmentwide Contract Vehicles Indicate whether your company has its own GSA Multiple Award Schedule (MAS) contract or other federal contract vehicle(s) under which NIST could award an order and, if so, provide the details of the contract(s) (contract number, Contracting Officer name/contact, SOW, terms and conditions, and price lists). Important Notes This Notice does not obligate the Government to award a contract or otherwise pay respondents to this notice for information provided in response to this Notice. Following a review of the responses and market research, NIST may publish a solicitation on an authorized site, depending on the chosen acquisition strategy. Responses received after the closing date for this Notice may not be considered. There is no solicitation available at this time. The Government reserves the right to use information that it receives in response to this Notice as it deems appropriate to establish final requirements or for other legally appropriate purposes. Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization’s capability. Respondents are advised that the Government is under no obligation to acknowledge receipt of the information received or provide feedback to respondents with respect to any information submitted. THANK YOU We truly appreciate your company’s willingness to take the time to provide the above-mentioned information, which will be valuable in helping NIST complete its market research! For additional information, please contact the primary contact or, if named, secondary contact identified at the bottom of this notice.

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