University of Missouri Ionwave #27-0020

University of Missouri Solicits Reactive Ion Etching System for Microfabrication Training

The University of Missouri is seeking bids for a Reactive Ion Etching System to support hands-on microfabrication training at Missouri S&T's new cleanroom facility. - Government Buyer: - University of Missouri, UM Procurement - Products/Services Requested: - Reactive Ion Etching System & Accessories - Must process substrates from 1 cm x 1 cm up to 6-inch wafers - Inductively Coupled Plasma (ICP) capability (>1000 Watt) - Five MFC-controlled process gas lines (SF6, CHF3, O2, N2, Ar) - Chemically resistant turbo-molecular pump and non-corrosive dry backing pump - Vacuum load-lock - Temperature management system with chiller - Software/Hardware package (if applicable) - Maintenance/Service agreement - Training (if applicable) - Installation (if applicable) - Shipping/Freight (including duties, fees, and tariffs) - Request for best available discount - Unique/Notable Requirements: - Equipment must be suitable for undergraduate microfabrication training - Compliance with University security and authentication standards (HECVAT, IdP Questionnaire) - Ability to integrate with University authentication methods - Vendors must provide detailed literature for all equipment, software/hardware, and services - OEMs and Vendors: - No specific OEMs are named; solicitation is open to qualified manufacturers and suppliers - Estimated contract value: $250,000 - $500,000 (typical for advanced etching systems with accessories and services) - The procurement is managed via the University of Missouri System's electronic bidding platform

Description

The University of Missouri is requesting bids for the furnishing and delivery of a Reactive Ion Etching System. This equipment will be used for hands-on training in microfabrication in undergraduate courses offered by the Semiconductor Engineering Bachelor's degree program at Missouri S&T. The system must meet specific technical requirements including ICP capability, multiple gas lines, chemically resistant pumps, vacuum load-lock, and temperature management. Bids must be submitted electronically through the University of Missouri System's bidding platform and comply with the terms and conditions provided.

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