University of Missouri Ionwave #27-0019

University of Missouri Solicits Rapid Thermal Process System for Microfabrication Training

The University of Missouri is seeking bids for a Rapid Thermal Process System to support microfabrication training in its Semiconductor Engineering program. - Government Buyer: - University of Missouri, UM Procurement - Contact: Amanda Barnes - Products Requested: - Rapid Thermal Process System & Accessories - Supports substrates from 1 cm x 1 cm up to 6-inch wafers - Manual substrate loading - Three mass flow controller (MFC) gas lines for N2, Ar, and forming gas - Maximum temperature of 1200°C - Programmable heating and cooling ramp rates of 100°C/sec - Temperature measurement and control - Recirculating chiller included - Associated software/hardware (if applicable) - Services Requested: - Training for system operation and maintenance - Installation services - Maintenance/service agreement options - Shipping/freight (including duties, fees, and tariffs) - Best discount offered - Unique Requirements: - System must be suitable for undergraduate hands-on microfabrication training - Suppliers must complete cybersecurity, privacy, and IT accessibility assessments (HECVAT and IdP Questionnaire) - No specific OEMs or vendors are named; all qualified manufacturers are invited to participate.

Description

The University of Missouri is requesting bids for the furnishing and delivery of a Rapid Thermal Process System. This equipment will be used in undergraduate courses providing hands-on training on microfabrication in the new cleanroom by the Semiconductor Engineering Bachelor's degree program at Missouri S&T. The system must meet specific requirements including rapid thermal annealing of substrates from 1 cm x 1 cm pieces up to 6-inch diameter wafers, manual substrate loading, three MFC controlled process gas lines, maximum temperature of 1200C, programmable heating and cooling ramp rates, temperature measurement and control, and a recirculating chiller. Qualified suppliers are invited to submit bids through the University of Missouri System's electronic bidding platform by the specified deadline.

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