SAM #80NSSC26940454Q

NASA Solicitation for Dry Vacuum Pump for ALD Processing Tool

NASA Shared Services Center is seeking a specialized dry vacuum pump for the Detector Development Labs' Atomic Layer Deposition (ALD) processing tool. - Government Buyer: - NASA Shared Services Center (part of the National Aeronautics and Space Administration) - Product Requested: - Dry vacuum pump (quantity: 1) - Technical requirements: - Electrical: 200-240VAC, 60Hz, 3 Phase - Peak pump speed: 59 CFM - Ultimate pressure: 1.5 x 10 Torr - Vacuum inlet: ISO 63 - Vacuum outlet: NW 40 - Water cooling: 2 l/m flow - Nitrogen purge: 28-44 Slm - Must withstand corrosive and pyrophoric gases (e.g., Titanium tetrachloride, Trimethylaluminum, Ammonia) - Dimensions: 784mm x 390mm x 526mm - Unique Requirements: - Pump must be suitable for ALD processes involving hazardous gases - Delivery lead time: 2-4 weeks after order; equipment is currently in stock - OEMs and Vendors: - No specific OEMs or vendors named; selection open to qualified manufacturers - Notable Details: - All technical specifications must be met for compatibility and safety in ALD operations

Description

SEE THE ATTACHED RFQ AND STATEMENT OF WORK. 

VENDORS MUST REFERENCE THE NOTICE ID IF SUBMITTING A PROPOSAL. 

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