SAM #1333ND26QNB030255

NIST Solicitation for Pfeiffer Turbo Molecular and Scroll Pumps for Semiconductor Metrology

NIST's Nanoscale Device Characterization Division is seeking advanced vacuum pump solutions to support semiconductor metrology research: - Government Buyer: - National Institute of Standards & Technology (NIST) - Nanoscale Device Characterization Division (NDCD), Nanoscale Spectroscopy Group (NSG) - OEMs and Vendors: - Pfeiffer Vacuum is specified as the OEM for both required pumps - Products Requested: - 1x Magnetically levitated turbomolecular pump - Pfeiffer Model HiPace 800 M (Part Number: 2000017803) - Key features: magnetically levitated rotor, air-cooled, 10-inch ISO-200 inlet flange, >475 l/s (H2) pumping speed, 18 m3/hr (air) pumping speed, <50 dBA noise, external control, minimum 2 m cable - 1x Transportation-related charges (not to exceed specified amount) - Unique/Notable Requirements: - Pumps must support EUV metrology for semiconductor manufacturing research - 1-year warranty required, commencing upon government acceptance - Delivery required within 12 weeks after order - Technical capability documentation must demonstrate compliance with the Statement of Work - Award will be made to the lowest priced, technically acceptable offeror - Small business set-aside under NAICS 339113

Description

As described in the attached Combined Synopsis Solicitation, Statement of Work, and RFO Provisions and Clauses.  

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