CanadaBuys #JC 12-25-1102

Plasma Assisted Reactive Magnetron Sputter System for Photonic Device Fabrication at McMaster University

McMaster University is seeking to acquire a Plasma Assisted Reactive Magnetron Sputter System (PARMS) for advanced photonic device fabrication. - Government buyer: - McMaster University, Hamilton, Ontario - OEMs and vendors: - IntlVac (Original Equipment Manufacturer and intended supplier) - Products/services requested: - Plasma Assisted Reactive Magnetron Sputter System - Must deposit dense, hydrogen-free silicon nitride, aluminium oxide, and silicon dioxide films - Requires precise control over film stress and thickness - Essential for low-loss photonic device fabrication - Must ensure high uniformity and repeatability of nitride and oxide films - Capable of practical deposition rates for thick film growth - No specific part numbers or purchase quantities provided - Unique or notable requirements: - System must use plasma-assisted reactive magnetron sputtering - Films produced must be suitable for high-performance photonic applications - Procurement is via Advance Contract Award Notice (ACAN), with IntlVac as the intended supplier unless alternatives can meet all requirements

Description

McMaster University is seeking to purchase a Plasma Assisted Reactive Magnetron Sputter System capable of depositing dense, hydrogen-free silicon nitride, aluminium oxide, and silicon dioxide films with precise control over film stress and thickness. The system must produce high-quality nitride and oxide films with excellent uniformity and repeatability via plasma-assisted reactive magnetron sputtering, suitable for low-loss photonic devices. The procurement is conducted through an Advance Contract Award Notice, signaling the university's intention to award a contract to IntlVac unless other suppliers demonstrate their capabilities. The contract is expected to start on June 1, 2027, with a duration of approximately zero months.

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