Opportunity
SAM #1333ND25QNB680436
NIST Solicitation for Ebara and Edwards Drop-in Replacement Vacuum Pumps
Buyer
DEPT OF COMMERCE NIST
Posted
July 31, 2026
Respond By
August 11, 2026
Identifier
1333ND25QNB680436
NAICS
423690, 339113, 423490
NIST's Boulder Micro-Fabrication Facility is procuring drop-in replacement scientific vacuum pumps to support microelectronics fabrication operations. - Government Buyer: - National Institute of Standards and Technology (NIST), Boulder Micro-Fabrication Facility - OEMs (Original Equipment Manufacturers): - Ebara - Edwards - Products Requested: - 9 units: Ebara EV-A03-1 vacuum pump (part number: Ebara EV-A03-1) - 6 units: Ebara EV-A03-2 vacuum pump (part number: Ebara EV-A03-2) - 2 units: Ebara EV-A06-2 vacuum pump (part number: Ebara EV-A06-2) - 1 unit: Edwards iXH 100 vacuum pump (part number: Edwards iXH 100) - 1 unit: Edwards iXH 610 vacuum pump (part number: Edwards iXH 610) - Shipping and transportation costs must be included (FOB Destination) - All pumps must be fully compatible as drop-in replacements with existing hardware and software - The acquisition is a firm-fixed-price, 100% small business set-aside - Pumps feature a range of pumping speeds (15 m/hr to 665 m/hr), various inlet/outlet sizes, and power requirements (120V/208V, single/three phase)
Description
Please see attached solicitation document for full details.