Opportunity
SAM #80NSSC26938324Q
NASA GSFC Procurement of EBARA EV-S20P Dry Vacuum Pumps and Power Cables for Semiconductor Etching
Buyer
NASA Shared Services Center
Posted
July 16, 2026
Respond By
July 20, 2026
Identifier
80NSSC26938324Q
NAICS
334516, 333999, 423690, 423490
NASA Goddard Space Flight Center is procuring specialized vacuum equipment for semiconductor etching applications: - Government Buyer: - NASA Goddard Space Flight Center (GSFC) - OEM Highlight: - EBARA TECHNOLOGIES INC is the specified manufacturer for all equipment - Products Requested: - 2 EBARA EV-S20P dry vacuum pumps (Part Number: 202179) - Specifications: 1670L/M flow, 200-220V, 50/60Hz, NW50 connection - Designed for use with semiconductor etching tools using fluorine and chlorine chemistries - Must be new and include a 12-month warranty - 2 Power Cable Assemblies (Part Number: 210516) - 6 feet, open end, compatible with EV-A10-3, VOS100, EV-S20 - Notable Requirements: - All equipment must be new and meet manufacturer specifications - Delivery required within 2-4 weeks after receipt of order - Equipment must be suitable for semiconductor process environments
Description
Synopsis:
NASA/NSSC has a requirement for two semiconductor-process compatible dry pumps.
NASA/NSSC intends to issue a sole source contract to EBARA TECHNOLOGIES INC: 51 MAIN AVE | SACRAMENTO, CA 95838 under the authority of FAR 12.102(a). It has been determined that EBARA TECHNOLOGIES INC is the sole provider of two semiconductor-process compatible dry pumps
NASA/NSSC will be the procuring center for this effort. Performance will be located at NASA/ Goddard Space Flight Center (GSFC).
The Government intends to acquire Commercial items or services using the provisions, clauses and procedures prescribed in FAR Part 12 for Commercial
The NAICS Code for this procurement is 334516.
Interested organizations may submit their capabilities and qualifications to perform the effort in writing to the identified point of contact not later than 3:00 p.m. Central Standard Time on 7/20/2026. Such capabilities/qualifications will be evaluated solely for the purpose of determining whether or not to conduct this procurement on a competitive basis. A determination by the Government not to compete this proposed effort on a full and open competition basis, based upon responses to this notice, is solely within the discretion of the government.
Oral communications are not acceptable in response to this notice.
NASA FAR Supplement Clause 1852.215-84, Ombudsman, is applicable. The Center Ombudsman for this acquisition can be found at https://www.hq.nasa.gov/office/procurement/regs/Procurement-Ombuds-Comp-Advocate-Listing.pdf .
Primary Point of Contact:
Cody Guidry
Procurement Specialist II