SAM #6-B187-Q-00311-00

Argonne National Laboratory Solicitation: Filmetrics F54-XY Thin-Film Mapping System and Accessories

Argonne National Laboratory, under the Department of Energy, is soliciting quotations for an advanced Automatic Thin Film Mapping Tool and related scientific equipment and services. - Government Buyer: - Argonne National Laboratory, operated by UChicago Argonne, LLC (DOE Contractor) - OEMs and Vendors: - KLA Corporation (Filmetrics product line) - Products Requested: - Filmetrics F54-XY Thin-Film Small-Spot Mapping System (Model F54-XY-200-UV), quantity: 1 - Deuterium-Tungsten Light Source (FO-PAT-SMASMA-600-1), quantity: 1 - Patch Fiber, SMA Connectors, 600um core, 1 Meter (FO-PAT-SMA-SMA-600-1), quantity: 1 - SiO2-on-Si thickness standards (TS-Focus-SiO24-3100, TS-SiO2-6-Multi), quantity: 1 each - Microscope Apertures (Aperture-MACmount-250um), quantity: 1 - 10x-UVX and 20x-UVX Reflective Microscope Objectives (OBJ-10X-UVX, OBJ-20X-UVX), quantity: 1 each - Motorized turret for F54XY (TurretMotorized-F54XY), quantity: 1 - AutoCal feature (AutoCal), quantity: 1 - Sample Stage Assembly-200mm, quantity: 1 - Pattern Recognition Software for F54-XY (UPG-F54-XY-PatternRecognition), quantity: 1 - Spare D2 Lamp (SPFILM-02), quantity: 1 - Spare TH1 Bulbs 5 Pak (SPFILM-02), quantity: 1 - Regular Warranty (13 months, KLA standard) - Services Requested: - Installation and training (part number 1165313-000), quantity: 1 - Unique or Notable Requirements: - System must have a spectrometer wavelength range of 190-1100nm, motorized turret with 10X and 20X objectives, automatic wavelength calibration, multilayer film thickness measurement, pattern recognition software, Windows 11 compatibility, USB 2.0 interface, vacuum chuck stage, and safety interlock enclosure - US-based field service support required - Delivery required within 3 months of award - Firm pricing, published price lists, and compliance with Argonne's terms and conditions are mandatory - Warranty coverage is 13 months from shipment, standard KLA terms

Description

Please furnish quotation to supply the materials and/or services indicated on page two (2), review the applicable documentation, and return any required documents to jmangis@anl.gov.

Any inquiries are to be directed to Jazlyn Mangis, (630) 252-6884, jmangis@anl.gov

Applicable Documentation:

Appendix “A” Argonne Terms and Conditions for Commercial Items, ANL-71COM, dated October 22, 2025. Review and Accept Appendix “B” Argonne Statement of Work, SOW, dated June 12, 2026. Review Attachment 1, Technical Requirements and Specifications, dated June 12, 2026. Review Moderate Risk On-Site Supplemental Conditions, ANL-366M, dated October 1, 2024. Review and Accept Acceptance Criteria Listing, ANL-266, dated June 9, 2025. Review and Accept Pre-Award Information, Representations and Certifications, ANL-70A, dated January 13, 2025. Complete and Return

Offeror to furnish a published price list to support quoted pricing.

The attached RFP/RFQ and only Argonne Terms and Conditions will govern any resultant order.

Proposal will be considered incomplete if any of the requested information, listed below, is not provided.

Provide the following with your quotation:

Signed Page one of the RFQ (ANL-70). Completed Representations and Certifications (ANL-70A). Provide a published price list or a redacted invoice showing pricing for the quoted, to prove price reasonableness. Verify the country of origin. Are these shipping domestically? If shipping internationally, please confirm ship from location and HTS code. Will you accept Pre-Pay and Add Shipping Charges to Invoice: Domestic (FOB Destination) or International (DAP Destination)? If any tariff charges will be applied to this order, the charge must be included in the unit price on the quote. We are unable to accept a tariff charge as a separate line item, as the Department of Energy considers this an unallowable cost. Confirm lead time. Are there any available discounts for DOE or does this order fall under GSA contract pricing (if yes, please include contract # and expiration date)?

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