SAM #FA860126Q0075

Procurement and Installation of Oxford Plasma Pro 100 ICP Etch System with Maintenance and Training at AFIT

This opportunity seeks vendors for the purchase, installation, and ongoing support of an Oxford Plasma Pro 100 ICP Etch system at the Air Force Institute of Technology (AFIT), Wright-Patterson AFB. - Government Buyer: - Department of the Air Force - Air Force Institute of Technology (AFIT), Engineering Laboratory, Wright-Patterson AFB - OEM Highlight: - Oxford Instruments is the specified manufacturer for the Plasma Pro 100 system and associated components - Products/Equipment Requested: - Oxford PlasmaPro 100 ICP Etch system (208V 60Hz 3-phase) - Includes Cobra300 3kW ICP plasma etch source, electrostatic shield, RF generators, ALE gas dose kit, wafer clamping and helium backing kit, and more - Julabo FP51 chiller (with 5m cable) - Quartz clamp (100mm wafer) - Standard Gas Pod (externally mounted, 12 lines max, split gas manifold, gasline heating kits) - BP1C-GP-MFC-MKS (8x standard gasline and MFC for non-toxic gases, 2x by-passed gasline and MFC for toxic gases) - Adixen ATH1600MT turbo pump kit (with ISO200 pipework) - Pfeiffer A124H ELT pump kit (with 10m cable) - PlasmaPro 100 chamber and pump down pipe heating kit - PlasmaPro 100 pumping foreline heating kit - Variable wavelength Ocean Optics optical EPD kit - PlasmaPro100 single loadlock kit - Roughing only to dry pump (isolation valve included) - Loadlock soft pump kit - Loadlock soft vent kit - Pfeiffer ACP15G dry pump kit - Services Requested: - Installation, setup, testing, and training for all equipment - Preventive and remedial maintenance, including periodic maintenance, service call response, equipment repair within 5 days, and compliance with safety/environmental regulations - Notable Requirements: - Vendors must provide all personnel, equipment, tools, parts, and supervision for installation and support - Training for faculty and staff is required - Compliance with safety, security, and environmental regulations is mandatory - Maintenance and repair services must be provided for one year - The full system must be installed and operational within 120 days after contract award

Description

SOURCES SOUGHT SYNOPSIS

Title: Purchase, Installation, and Training for a PlasmaPro 100 Reactive Ion Etch (RIE) System

Agency: Department of the Air Force, Air Force Materiel Command, Air Force Life Cycle Management Center (AFLCMC)

Location: Wright-Patterson AFB, OH

Classification Code: J066 - Maintenance, Repair and Rebuilding of Equipment-Instruments and Laboratory Equipment

NAICS Code: 811310 - Commercial and Industrial and Machinery and Equipment

This is a Sources Sought Synopsis announcement only. This is not a solicitation for proposals, proposal abstracts, or quotations. The purpose of this synopsis is to gain knowledge of potential qualified sources and their size classification (Small Business, HUBZone, 8(a), Service-Disabled Veteran-Owned Small Business, Women-Owned Small Business, etc.) relative to NAICS code 811310.

The Government is seeking to identify responsible and eligible vendors who can provide all personnel, equipment, tools, parts, and supervision necessary to perform installation, setup, testing, and training for one Oxford Plasma Pro 100 RIE system, along with all required support equipment (chillers, vacuum systems, etc.). The equipment will be located in the Engineering Laboratory at the Air Force Institute of Technology (AFIT), Wright-Patterson AFB, OH. The period of performance is 120 days after contract award. This requirement is anticipated to be above the Simplified Acquisition Threshold (SAT).

The full list of required components is detailed in the attached Statement of Work. Key components include, but are not limited to:

PlasmaPro 100 ICP Etch system with a 208V 60Hz 3-phase supply. Cobra300 3kW ICP plasma etch source. Cryo-cooled/electrically-heated etch lower electrode kit. Complete gas delivery system including standard and by-passed gaslines, MFCs, and a split gas manifold. Associated vacuum pumps, chillers, and control hardware (PC, monitor, etc.).

INSTRUCTIONS FOR RESPONSE:

Interested parties are requested to submit a capabilities statement that shall include the following information:

Company Information: Company name, physical mailing address, and CAGE CODE and Unique Entity ID (UEI). Point of Contact: Name, phone number, and email address of a designated point of contact. Company business size status under a relevant NAICS code. Prospective contractors must be registered in the System for Award Management (SAM) database at https://www.sam.gov to be eligible for a Department of Defense contract award Ownership: A statement as to whether your company is domestically or foreign-owned or controlled (if foreign, please indicate the country), and whether use of any foreign national employees is contemplated on this effort. Socio-Economic Status: Statement of socio-economic status (e.g., Large Business, Small Business, 8(a), HUBZone, Service-Disabled Veteran-Owned Small Business, etc.). Manufacturer/Distributor Status: Indicate if you are the manufacturer of the system or a distributor. If a distributor, provide the name of the manufacturer. Proprietary Data: A statement confirming whether the respondent will allow the Government to release any proprietary data submitted. The Air Force will handle proprietary items in accordance with FAR 2.101 and 3.104. Past Performance: Describe your company's past experience on previous projects of similar complexity to this requirement. Include contract numbers, project descriptions, agency/organization supported, and a point of contact for each reference. Capabilities: Briefly describe the capabilities of your facility and the nature of the services/supplies you provide. System Viability: Identify any specific requirements in the provided documentation that would currently preclude your product/service from being a viable solution. Commerciality: Provide recent sales history to commercial companies to help determine commerciality. State if the product/service is offered to both U.S. Government and commercial sources under similar terms and conditions, and briefly describe any differences.

Attention Small Business Respondents: The acquisition strategy for this requirement has not been decided. The Air Force is contemplating a small business set-aside if there is sufficient demonstrated interest and capability. Note that a key factor is that two or more small business prime contractors must be capable of performing at least 50% of the cost of the contract for personnel with their own employees, as defined in FAR clause 52.219-14, Limitations on Subcontracting. If you are a small business, please provide specific details and rationale as to how you would comply with this clause.

Attention All Potential Respondents: If this acquisition is not set aside for small business, it may include a small business utilization requirement. Please provide feedback on what areas of this requirement are likely candidates for small business subcontracting.

CLOSING: Responses to this Sources Sought notice must be submitted via email no later than July 2, 2026, at 11:00am Eastern Time. All correspondence sent via email must contain the subject line: “FA860126Q0075, Sources Sought: Plasma Pro 100.”

Be advised that due to network filters, attachments ending in .zip or .exe are not allowable and will be deleted. The points of contact for this action are Brian Algeo, Contract Specialist, at brian.algeo.1@us.af.mil, and Candice Snow, Contracting Officer, at candice.snow@us.af.mil.

This is a Sources Sought notice for market research purposes only. In accordance with Revolutionary FAR Overall (RFO) 15.201, responses to this notice are not considered offers and cannot be accepted by the Government to form a binding contract. Any information submitted by respondents to this notice is strictly voluntary and will not be reimbursed by the Government. The Government’s assessment of the capability statements received will factor into whether any forthcoming solicitation will be conducted as a full and open competition or as a set-aside.

Please submit your responses via email to the contracting office points of contact: Ms. Candice L. Snow (candice.snow@us.af.mil) and Mr. Brian Algeo (brian.algeo.1@us.af.mil)

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