CanadaBuys #26-58022

Procurement of Automated Wafer Defect Inspection System and ICP Plasma Processing Module for NRC

The National Research Council Canada (NRC), through the Canadian Photonics Fabrication Centre (CPFC), is seeking to procure two advanced semiconductor manufacturing systems: - Government Buyer: - National Research Council Canada (NRC) - Canadian Photonics Fabrication Centre (CPFC) - Procurement and Contracting Services | Finance and Procurement Services Branch - OEMs and Vendors: - KLA Corporation (sole OEM and supplier) - Products/Systems Requested: - Automated Wafer Defect Inspection and Surface Characterization System (SDIP) - 1 unit required - High-resolution, non-destructive optical inspection for compound semiconductor wafers (GaAs, InP, GaN, sapphire, Si, Ge, GaN on SiC) - Automated cassette-to-cassette wafer handling (2 to 8 inch wafers) - Generates defect maps, particle distribution, surface roughness, and haze measurements - Integrates with CPFC workflows, historical datasets, and SEMI communication protocols (GEM, SECS, HSMS) - Inductively Coupled Plasma (ICP) Processing Module - 1 unit required - Designed for direct integration with the proprietary KLA/SPTS Omega fxP plasma processing platform - Supports high-density plasma etching of compound semiconductor materials (GaAs, InP, GaN, Si) - Capable of 4-inch wafer processing - Fully compatible with Omega fxP hardware, control software, process libraries, and maintenance environment - Includes all hardware, software integration, installation, commissioning, training, and technical support - Unique/Notable Requirements: - Both systems must be fully compatible with existing KLA/SPTS Omega fxP platform at CPFC - Sole-source justification due to proprietary technology and exclusive compatibility - All equipment must meet Canadian Electrical Code standards - Procurement includes supply, delivery, installation, commissioning, training, and ongoing technical support - Subject to multiple trade agreements

Description

The National Research Council of Canada (NRC) seeks to procure two systems: an Automated Wafer Defect Inspection and Surface Characterization System (SDIP) and an Inductively Coupled Plasma (ICP) Processing Module. The SDIP system must provide high-resolution, non-destructive optical inspection of semiconductor wafers and generate detailed defect maps and surface roughness data. The ICP module must be compatible with the existing Omega fxP plasma platform and support high-density plasma etching of compound semiconductor materials. The procurement includes supply, delivery, installation, commissioning, training, and support, with delivery dates in 2027.

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