CanadaBuys #2026-RFPN-00502 CH

Procurement of Atomic Layer Etcher (ALE) System for Quantum Device Fabrication

The University of Waterloo, supported by the Government of Canada, is seeking bids for an Atomic Layer Etcher (ALE) System to advance quantum device fabrication at its Quantum-Nano Fabrication and Characterization Facility (QNFCF). - Government Buyer: - University of Waterloo (core scientific platform under Canadian federal support) - Products/Services Requested: - Atomic Layer Etcher (ALE) System - For precise etching of thin layers of dielectrics, metals, and superconducting materials - Supports advanced research in materials science, nanotechnology, and quantum information processing - No specific OEMs, part numbers, or vendors specified - Notable Requirements: - System must be suitable for integration into a leading-edge quantum fabrication facility - Open competitive bidding process via MERX - Place of Performance: - University of Waterloo, 200 University Avenue West, Waterloo, Ontario, N2L 3G1, Canada

Description

The solicitation is for an Atomic Layer Etcher (ALE) System to be used for the precise etching of thin layers of dielectrics, metals, and superconducting materials in the fabrication of quantum devices. This system will be part of the University of Waterloo's Quantum-Nano Fabrication and Characterization Facility (QNFCF) core scientific platform, supporting research in materials science, nanotechnology, and quantum information processing. The procurement is conducted through competitive open bidding and documents are available on MERX. The contract is set to start on February 28, 2027.

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