University of Waterloo Bonfire #2026-RFPN-00502

University of Waterloo Solicits Atomic Layer Etcher (ALE) System for Quantum Device Fabrication

The University of Waterloo is seeking proposals for an Atomic Layer Etcher (ALE) system to enhance its quantum device fabrication capabilities at the Quantum-Nano Fabrication and Characterization Facility (QNFCF). - Government Buyer: - University of Waterloo (Canadian academic institution) - Quantum-Nano Fabrication and Characterization Facility (QNFCF) as the end user - Products/Services Requested: - Atomic Layer Etcher (ALE) system - For precise etching of thin layers of dielectrics, metals, and superconducting materials - Supports research in quantum devices, materials science, and nanotechnology - No specific part numbers or quantities provided - OEMs and Vendors: - No specific OEMs or vendors mentioned in the solicitation - Unique or Notable Requirements: - System must be suitable for quantum device fabrication - Proposals must include experience, references, warranty information, and detailed quotations - All submission documents required in PDF format - Place of Performance: - University of Waterloo, Quantum-Nano Fabrication and Characterization Facility (Waterloo, Ontario, Canada)

Description

This RFP is for the procurement of an Atomic Layer Etcher system to be used for precise etching of thin layers of dielectrics, metals, and superconducting materials in the fabrication of quantum devices. The system will be part of the University of Waterloo's Quantum-Nano Fabrication and Characterization Facility core scientific platform. The facility supports research in materials science, nanotechnology, and quantum information processing. The solicitation includes submission requirements such as proposal, experience references, warranty information, and detailed quotations in PDF format.

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