SAM #NIST-SS26-133

Silane Distribution System for NIST Boulder Micro-Fabrication Facility

NIST Boulder is seeking a silane distribution system for its Micro-Fabrication Facility, with a strong preference for compatibility with existing CiphercoN platform equipment and safety infrastructure. - Government Buyer: - National Institute of Standards and Technology (NIST), Boulder Micro-Fabrication Facility, Katharine Blodgett Gebbie Building - OEMs and Vendors: - CVD Equipment Corporation (intended sole source, OEM) - CiphercoN (platform and gas rack) - FlexGas (valve manifold box) - Products/Services Requested: - Silane Gas Rack (CiphercoN 1500 Gas Rack or equivalent) - Quantity: 1 - Must be compatible with SDC CiphercoN 1500 spare parts - Features: Automated control, safety interlocks, UVIR detection, communication with Toxic Gas Monitoring System - Silane Valve Manifold Box (FlexGas VMB or equivalent) - Quantity: 1 - Delivers UHP silane to up to 8 process tools - Features: Automated control, safety shutoffs, nitrogen purge, communication with Toxic Gas Monitoring System - Delivery, installation, commissioning, and operational training - Unique/Notable Requirements: - System must integrate seamlessly with existing CiphercoN platform and SDC CiphercoN 1500 toxic gas cabinets - Compliance with SEMI S2 and CGA-13 standards - Automated safety features and communication with facility's Toxic Gas Monitoring System - Facilitization period between delivery and commissioning (minimum 1 month, maximum 1 year) - Site acceptance testing and written operational instructions required - Place of Performance: - Katharine Blodgett Gebbie Building, Boulder Micro-Fabrication Facility, NIST Boulder, Boulder, CO - Contracting Office: - DEPT OF COMMERCE NIST, 100 Bureau Dr., Gaithersburg, MD

Description

THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE

The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government’s anticipated needs. If no alternate sources are identified, the Government intends to issue a Sole Source Award to CVD Equipment Corporation, 355, South Technology Drive, Central Islip, NY 11722, US, under the authority of FAR 12.102(a). The North American Industry Classification System (NAICS) code for this acquisition is 333242, Semiconductor Machinery Manufacturing.

BACKGROUND

The National Institute of Standards and Technology (NIST) has a state-of-the-art research laboratory (the Katharine Blodgett Gebbie Building) in Boulder, CO to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). Among the many critical pieces of equipment in this laboratory is equipment that uses the process gases silane (SiH4). Silane is a toxic and pyrophoric gas and needs to be stored in and outside bunker using a gas rack and is delivered to tools through a specialized gas valve manifold box (VMB). Recently, the BMF has learned that their existing system has reached end of life and the system needs to be replaced for safety and operational reasons. The Government requires a new silane delivery system that is compatible with its existing life safety equipment, such as the toxic gas monitoring system (TGMS) and other gas cabinets to continue to use silane as process gases.

The NIST BMF has many toxic gases that it uses in the process of making its NIST mission critical devices. Among these gases is silane which, for safety reasons, is sourced out of a single bottle in an outside gas bunker. Further distribution through the BMF requires the use of a Valve Manifold Box (VMB). Due to the life safety hazards associated with the toxic gas systems, the BMF has standardized to the Ciphercon platform to ensure it ensuring operators only need to interact with a single, familiar control interface during high-stress emergencies and allows the BMF to have a stable of spare parts to use for the systems. The BMF currently has an installed base of six SDC Ciphercon 1500 toxic gas cabinets, which are fully integrated into our facility's TGMS. Procuring this replacement directly from CVD Equipment Corp is the only way to ensure a seamless platform for safe operation and allow for a clean, straightforward integration with the existing TGMS.

NIST conducted market research from March through May 2026 by performing internet searches, reviewing past awards for commissioning of previous systems in the BMF, and speaking with vendors to determine what sources could meet NIST’s minimum requirements. The results of that market research revealed that only CVD Equipment Corporation (UEI: PHV4F6NMWQQ4) appears to be capable of meeting NIST’s requirements.

HOW TO RESPOND TO THIS NOTICE

In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice. Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response.

Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI).

Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice. For each product recommended to meet the Government’s requirement, provide the following: Manufacturer name Model number Technical specifications If your company is not the manufacturer, provide information on your company’s status as an authorized reseller of the product(s)

Describe performance capabilities of the product(s) your company recommends to meet the Government’s requirements. Additionally, if there are other features or functions that you believe would assist NIST in meeting its objectives described above, please discuss in your response. Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization.

Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section you cannot meet and state why. Please offer suggestions for how the market research notice and draft minimum specifications could be made more competitive.

State whether the proposed equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured.

Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details, including timeline.

For the NAICS code listed in this notice: Indicate whether your company is (a) a small business or (b) other than small business. See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information. If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.

Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance. Describe standard terms and conditions of sale offered by your company for the recommended equipment such as: delivery time after your company accepts the order; FOB shipping terms; manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services. Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available.

State whether your company offers facility renovation services related to installation of the recommended equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of said services. Indicate if your company performs the facility renovation services or typically subcontracts the work to another company. Indicate if your company would be interested in inspecting the intended installation site during the market research phase.

State published price, discount, or rebate arrangements for recommended equipment and/or provide link to access company’s published prices for equipment and services.

If the recommended equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able to place orders, identify the contract number(s) and other relevant information.

Identify any customers in the public or private sectors to which you provided the recommended or similar equipment. Include customer(s) information: company name, phone number, point of contact, email address.

Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement.

State if you require NIST to provide additional information to improve your understanding of the government’s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment.

QUESTIONS REGARDING THIS NOTICE

Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received 5 calendar days prior to the response date. If the Contracting Officer determines that providing a written amendment to this notice to document question(s) received would benefit other potential respondents, the questions would be anonymized, and a written response to such question(s) would be provided via an amendment to this notice.

IMPORTANT NOTES

This notice is for market research purposes and should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract. There is no solicitation available at this time.

This notice does not obligate the Government to award a contract or otherwise pay for the information provided in response.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and legally appropriate.

Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization’s capability.

Respondents are advised that the Government is under no obligation to acknowledge receipt of the information received or provide feedback to respondents with respect to any information submitted.

After a review of the responses received, a synopsis and solicitation may be published on GSA’s eBuy or SAM.gov. However, responses to this notice will not be considered an adequate response to any such solicitation(s).

The responses shall not exceed 10 pages including all attachments, charts, etc.

Thank you for taking the time to submit a response to this request!

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