SAM #1333ND26QNB030077

NIST Solicitation for High-Vacuum Compatible Rotary Stage and Equipment

NIST's Physical Measurement Laboratory is seeking high-vacuum compatible sample positioning equipment to support advanced semiconductor measurement applications: - Government Buyer: - National Institute of Standards and Technology (NIST), Physical Measurement Laboratory (PML), Nanoscale Device Characterization Division (NDCD) - Products and Equipment Requested: - Large aperture high-vacuum compatible rotary stage (1 unit) - Must support base pressure below 10^-6 Torr (with options for 10^-8 and 10^-9 Torr) - Clear aperture: 135-200 mm diameter - Rotation range: -180 to 180 degrees - Repeatability: 0.003 deg; Accuracy: 0.004 deg - Axial load capacity: 35 kg - Vacuum-compatible cabling, encoder, cleaned and bagged for high-vacuum service - Motion controller, power supply, and software (1 unit) - Software-controlled operation, Windows GUI, LabView SDK, USB/GPIB/serial communication - 120 VAC power supply, minimum 3 m cabling - Vacuum feedthrough (1 unit) - DN100 CF (6-inch ConFlat) flange with electrical feedthroughs for motion control, power, and encoder feedback - Cleaned and bagged for high-vacuum service - Engineering services prior to manufacturing (1 unit) - Provision of mechanical (CAD) drawings for NIST approval before manufacture - Transportation and related expenses (Not to Exceed amount) - Unique or Notable Requirements: - Equipment must be compatible with high-vacuum environments, with optional upgrades for ultra-high vacuum (UHV) compatibility - Vendors must demonstrate technical capability and experience with vacuum procedures and materials - Delivery and acceptance include review and approval of mechanical drawings and performance testing upon delivery - No specific OEMs or part numbers are named; vendors must propose suitable commercial solutions - Place of performance and delivery: NIST, Gaithersburg, Maryland

Description

As defined in the Attached Combined Synopsis Solicitation, Statement of Work and Applicable Provisions and Clauses.

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