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Plasma Enhanced Chemical Vapor Deposition (PECVD) Tool Procurement for Western Nanofabrication Facility

The University of Western Ontario is soliciting proposals for a Plasma Enhanced Chemical Vapor Deposition (PECVD) tool for its Western Nanofabrication Facility. - Government Buyer: - University of Western Ontario Procurement Services, London, Ontario - Products/Services Requested: - Plasma Enhanced Chemical Vapor Deposition (PECVD) tool - For deposition of silicon oxide, silicon nitride, and amorphous silicon on silicon wafers - Supports both single-layer and multi-layer structures - Installation of the PECVD tool - OEMs and Vendors: - No specific OEMs or vendors are named in the solicitation - Unique/Notable Requirements: - Proposals must include mandatory submission forms - Technical requirements for the PECVD tool must be met - Commitment to sustainability in procurement is required - Estimated Contract Value: - CAD$375,000 plus HST - Place of Performance: - Western Nanofabrication Facility, London, Ontario - Contracting office: Procurement Services, University of Western Ontario

Description

This solicitation is a Request for Proposal (RFP) for the supply and installation of a Plasma Enhanced Chemical Vapor Deposition (PECVD) tool to be installed in the Western Nanofabrication Facility. The PECVD tool will be used for deposition of silicon oxide, silicon nitride, and amorphous silicon on silicon wafers, including both single layers and multi-layer structures. The estimated total pre-tax budget for this procurement is CAD$375,000 plus HST. Tender submissions must be uploaded electronically, and the contract is expected to start in December 2026.

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