SAM #80NSSC26931764Q

Preventative Maintenance for Canon i-Line Stepper Lithography Systems at NASA GSFC

NASA is seeking preventative maintenance services for its Canon i-line stepper lithography systems at the Goddard Space Flight Center (GSFC). - Government Buyer: - NASA Goddard Space Flight Center (GSFC) Detector Development Laboratory - NASA Shared Services Center (NSSC) - OEM Highlight: - Canon is the sole Original Equipment Manufacturer (OEM) specified for the i-line stepper lithography systems - Products/Services Requested: - Preventative maintenance services for Canon 3030ia+ i-line stepper lithography system - Preventative maintenance contract for Canon 5x i-Line Stepper Photolithography system - No specific part numbers or quantities provided; one agreement is for a single system - Notable Requirements: - Maintenance is critical for submicron scale wafer patterning supporting planetary defense and national security projects - The procurement is sole source to Canon USA Inc for the 3030ia+ system - Performance will occur at NASA Goddard Space Flight Center - This is not a request for quotes; capability statements are requested - Locations: - NASA Goddard Space Flight Center, Greenbelt, Maryland - NASA Shared Services Center, Stennis Space Center, Mississippi (contracting office)

Description

NASA/NSSC has a requirement for a preventative maintenance agreement for Canon 3030ia+ i-line stepper lithography system. See the attached SOW and request for capability statements. 

All correspondence should reference ID 80NSSC26931764Q in the subject line to ensure visisbility.

PLEASE NOTE* THIS IS NOT A REQUEST FOR QUOTES. ANY PRICING OFFERED WILL NOT BE REVIEWED OR ACCEPTED AT THIS TIME.

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