SAM #NB305000-26-00682

Sole Source Procurement: Coherent OBIS 320nm XT CW UV Laser for NIST Semiconductor Metrology

NIST's Physical Measurement Lab intends to award a sole source contract to Coherent for a specialized CW UV Laser to support semiconductor metrology for the CHIPS project. - Agency: National Institute of Standards and Technology (NIST), Physical Measurement Lab, Nanoscale Device Characterization Division - Procurement: One (1) Coherent OBIS 320nm XT CW UV Laser, 40mW output - OEM: Coherent - Key specs: 320 nm wavelength, 40 mW power, continuous wave, high beam quality (M2 ≤ 1.1), TEM00 spatial mode - Includes delivery and a one-year warranty - Purpose: Enables photoemission electron spectroscopy and microscopy for advanced semiconductor research - NAICS: 334516 (Analytical Laboratory Instrument Manufacturing) - PSC: 6640 (Laboratory Equipment and Supplies) - Sole source justification: Coherent is the only known source for this specific laser model - Place of performance: NIST, Gaithersburg, MD - Response deadlines: Questions due April 28, 2026; submissions due May 1, 2026

Description

SEE ATTACHED NOTICE OF INTENT TO SOLE SOURCE FOR RESPONSE INSTRUCTIONS AND PERTINENT DETAILS

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