SAM #NIST-SS26-105

Sources Sought: Rapid Thermal Annealing System for NIST Boulder Microfabrication Facility

NIST is seeking market information for a Rapid Thermal Annealing (RTA) System for its Boulder Microfabrication Facility: - Government Buyer: - Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division - Products/Services Requested: - Rapid Thermal Annealing System - Must process substrates up to 150 mm - Meets ISO class 5 cleanroom and semiconductor industry standards - Temperature range: room temperature to 1200°C, with ±1°C stability - Ramp rate: at least 100°C/s - Capable of annealing in vacuum and gas environments - Delivery of at least four gases with digital mass flow controllers - Footprint not exceeding 1 m x 1 m x 2 m - Only new, commercially available systems (no prototypes, used, or refurbished equipment) - Related services: installation, training, and maintenance - OEMs and Vendors: - No specific OEMs or vendors are named in the notice - Unique/Notable Requirements: - System must be suitable for ISO class 5 cleanroom - Only new, commercially available equipment will be considered - Vendors must provide information on installation, training, and maintenance services - Place of Performance: - Boulder Microfabrication Facility (BMF), NIST, Boulder, CO 80305

Description

Notice ID Number: NIST-SS26-105

Title: Sources Sought Notice for Rapid Thermal Annealing System

The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government’s anticipated needs.

BACKGROUND

The Boulder Microfabrication Facility (BMF) is an ISO class 5 cleanroom that micro-  and nano- fabricates devices to meet the NIST mission.  Part of the required processing includes rapidly annealing films.  This is achieved though using a Rapid Thermal Annealing (RTA) system. The BMF currently has an RTA system used to process 76.2 mm substrates, and the BMF currently requires the ability to process up to 150 mm substrates.

The minimum specifications for the RTA system are:

Must be able to perform RTA according to semiconductor industry standards. Must meet all applicable safety and cleanliness standards for use in an ISO class 5 cleanroom. Must be able to reach temperatures of room temperature to 1200 °C with a temperature stability of +/- 1 °C Must have a ramp rate of at least 100 °C/s Must be able to anneal substrates in a vacuum and in gas environments. Must be able to deliver at least 4 gasses including but not limited to 5 % H2 in Ar, Ar, Pure dry air (80 % N2 / 20 % O2), and nitrogen with digital mass flow controllers. Must be able to fit in a 1 m x 1 m  x 2 m (W X D X H) floor space. Must be able to process substrates from chips to 150 mm SEMI spec wafers. Must be able to load samples with a clamshell or tray loading system with a preference for a clamshell system. Prototypes, one-off systems, demonstration models, used instruments, or refurbished instruments will not be considered for award.

HOW TO RESPOND TO THIS NOTICE

In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response:  Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice.  Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response.

Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI). Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice.  For each product recommended to meet the Government’s requirement, provide the following: Manufacturer name Model number Technical specifications If your company is not the manufacturer, provide information on your company’s status as an authorized reseller of the product(s) Describe performance capabilities of the product(s) your company recommends to meet the Government’s requirements.  Additionally, if there are other features or functions that you believe would assist NIST in meeting its objectives described above, please discuss in your response. Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization. Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section you cannot meet and state why.  Please offer suggestions for how the market research notice and draft minimum specifications could be made more competitive. State whether the proposed equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured. Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details, including timeline. For the NAICS code listed in this notice: Indicate whether your company is (a) a small business or (b) other than small business.  See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information. If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.  Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance. Describe standard terms and conditions of sale offered by your company for the recommended equipment such as: delivery time after your company accepts the order; FOB shipping terms; manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services.  Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available. State whether your company offers facility renovation services related to installation of the recommended equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of said services.  Indicate if your company performs the facility renovation services or typically subcontracts the work to another company.  Indicate if your company would be interested in inspecting the intended installation site during the market research phase. State published price, discount, or rebate arrangements for recommended equipment and/or provide link to access company’s published prices for equipment and services.  If the recommended equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able to place orders, identify the contract number(s) and other relevant information. Identify any customers in the public or private sectors to which you provided the recommended or similar equipment.  Include customer(s) information: company name, phone number, point of contact, email address. Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement. State if you require NIST to provide additional information to improve your understanding of the government’s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment.

QUESTIONS REGARDING THIS NOTICE

Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received by 5:00 PM ET on April 14, 2026. If the Contracting Officer determines that providing a written amendment to this notice to document question(s) received would benefit other potential respondents, the questions would be anonymized, and a written response to such question(s) would be provided via an amendment to this notice.

IMPORTANT NOTES

This notice is for market research purposes and should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract.  There is no solicitation available at this time.

This notice does not obligate the Government to award a contract or otherwise pay for the information provided in response.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and legally appropriate.

Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization’s capability.

Respondents are advised that the Government is under no obligation to acknowledge receipt of the information received or provide feedback to respondents with respect to any information submitted.

After a review of the responses received, a synopsis and solicitation may be published on GSA’s eBuy or SAM.gov. However, responses to this notice will not be considered an adequate response to any such solicitation(s).

The responses shall not exceed 2 pages including all attachments, charts, etc.

Thank you for taking the time to submit a response to this request.

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