SAM #NIST-SS26-103

NIST Sole Source Procurement of Nikon Optical Microscope for VLSI Wafer Inspection

NIST's Alternative Computing Group in the Physical Measurement Laboratory plans to procure a specialized optical microscope from Nikon Metrology via a sole source contract. - Purpose: Inspection of custom VLSI wafers before and after device addition, used in NIST's CNST clean room and by research collaborators - OEM: Nikon Metrology, LLC (12701 Grand River Road, Brighton, MI) - Key technical requirements: - 100x apochromat objective (NA ≥ 0.9, WD ≥ 2 mm) - Supports brightfield, darkfield, and DIC contrast mechanisms - Accommodates wafers up to 8 inches (200 mm) - Fully motorized stage with encoder (speed: 240 mm/s) - Scientific color CMOS camera (sensor ≥ 35.8 mm x 23.8 mm, ≥6000 x 3984 pixels, pixel size ≥6 um) - Includes all necessary control and image stitching software - Only Nikon Metrology can meet all requirements per market research - NAICS code: 334516 (Analytical Laboratory Instrument Manufacturing) - Place of performance and delivery: NIST, Gaithersburg, MD - No competing products or services identified; sole source justification - Estimated contract value: Likely $100,000–$250,000 based on similar high-end microscopes

Product Line Item: - Nikon Optical Microscope (1 unit)

Place: - NIST, Gaithersburg, Maryland (Federal Facility)

Period of Performance: - Not specified; likely single delivery upon award

Description

Announcement Type: Special Notice Classification Code: 6695

Announcement Number: NIST-SS26-103

Subject: Notice of Intent to Noncompetitively Acquire Optical Microscope - Nikon Metrology (UEI: NP7BRVCLFN51)  

The Alternative Computing Group in the Physical Measurement Laboratory (PML) Division 683 conducts research addressing the rapidly expanding measurement needs of new hardware for artificial intelligence, exploring emerging computing hardware, architectures and algorithms, and developing chip-based test vehicles for massively parallel measurements.  A significant portion of this work involves procurement of CMOS wafers up to 8” (200 mm) in diameter from foundries, and integrating custom nanoscale devices on top of them, either in the NIST NanoFab or through research partnerships and CRADAs with universities and companies.   A crucial step in this research is the microscopic inspection of whole wafers to characterize them, in particular highlighting any defects that may be present. For this purpose, NIST requires an optical microscope capable of observing 200 mm wafers at a range of magnifications extending to at least 100X.  To allow stitching together of an array of images to cover large portions of the wafer, an encoded motorized stage and software are required.  

NIST intends to award a non-competitive contract to Nikon Metrology for an optical microscope to be used for inspection of custom VLSI wafers both before and after addition of specialized devices by NIST personnel in NIST's CNST clean room and by research collaborators.

This notice is not a request for a quotation. A solicitation document will not be issued, and quotations will not be requested.

This acquisition is being conducted under the authority of RFO 12.102(a). The North American Industry Classification System (NAICS) code for this acquisition is 334516, Analytical Laboratory Instrument Manufacturing.

NIST requires a solution that meets the following minimum requirements:

Has a collection of objectives, including a 100x apochromat objective with numerical aperture (NA) at least 0.9 and working distance (WD) at least 2 mm; Is compatible with brightfield, darkfield, and differential interference (DIC) contrast mechanisms; Can accommodate wafers up to 8" (200 mm) in size; Has a fully motorized stage with encoder, allowing acquisition of stitched images; Has a stage speed of up to 240 mm/s; (6) includes a scientific color CMOS-based camera with sensor at least 35.8 mm x23.8 mm, pixel count 6000 x 3984 or greater and pixel size 6 um x 6 um or larger; and Includes all software necessary for complete control of motorized components and camera, allowing acquisition of precision stitched images.

After thorough evaluation, it has been determined that the optical microscope from manufacturer, Nikon Metrology, is essential for several reasons:

Technical: Only Nikon can supply a 100x apochromat objective with numerical aperture (NA) at least 0.9 and working distance (WD) at least 2 mm. Other manufacturers of optical microscopes cannot meet this requirement. Based on market research, other manufacturers cannot simultaneously meet the requirement of an apochromatic 100X objective, a NA of 0.9, and a WD of 2 mm. Other manufacturers' 100X apochromatic objectives have a WD as small as 0.21 mm, requiring extreme care to avoid colliding with the sample.  Other manufacturers' 100X objectives with a longer working distance are not apochromatic. The samples the NDCD will be observing require months of intense nanofabrication to create, both by NIST personnel and collaborators, making observation at 0.21 mm working distance intolerably risky.  Without an apochromatic lens, critical detail will not be observable. 2) Only Nikon can supply a motorized stage that can travel as fast as 240 mm/s.  Without this stage speed, acquisition of large area stitched images with take an intolerably long time, subjecting the measurements to possible thermal drift and/or other calibration errors.  And 3) Only Nikon provides a CMOS camera with chip as large as 35.8 mm x 23.8 mm, minimum pixel count of 6000 c 3984, and minimum pixel size of 6 um x 6 um.  Other manufacturers' cameras have chip sizes ranging from 5.4 mm to 12.4 mm and pixel sizes 2.4 um to 2.74 um.  These smaller CMOS chips result in a lower signal to noise ratio that is insufficient for acquiring the images we need to obtain from our wafers. Nikon Metrology is the only company that can provide the required optical microscope in accordance with the minimum listed above and therefore is the sole source.

NIST conducted market research from December 2024 – December 2025 by conducting online searches, discussions with sources, and discussions with colleagues to determine what sources could meet NIST’s minimum requirements.  The results of that market research revealed that only Nikon Metrology, LLC,  12701 Grand River Road Brighton, Michigan 48116, USA, UEI: NP7BRVCLFN51 appears to be capable of meeting NIST’s requirements. The Government intends to issue a Sole Source Award to Nikon Metrology, under the authority of FAR 12.102(a). The North American Industry Classification System (NAICS) code for this acquisition is 334516. 

However, any sources that believe they are capable of meeting NIST’s minimum requirements are encouraged to respond to this notice by the response date to provide the following information at a minimum: Company Unique Entity Identifier number in https://sam.gov; details about what your company is capable of providing that meets or exceeds NIST’s minimum requirements; whether your company is an authorized reseller of the product or service being cited and evidence of such authorization; and any other information that can help NIST determine whether this requirement may be competitively satisfied.

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