# DOE Supports Chip Lithography Pilot

DOE’s Office of Science is supporting a pilot to connect semiconductor manufacturers with Brookhaven and Lawrence Berkeley national laboratory capabilities for lithography and metrology research. The effort creates a potential facility-access and collaboration avenue, but DOE has not announced a separate solicitation, contract award, or funding amount for the pilot. DOE’s earlier $179 million commitment to Microelectronics Science Research Centers, made in January 2025, is separate from this pilot.

- Contractors and technology firms can use the workshops and technical exchanges mentioned in the signal to identify potential participation and collaboration opportunities.
- Procurement teams should distinguish this research-access pilot from a funded acquisition: no procurement vehicle, award timeline, or pilot-specific budget is stated.

**Jurisdictions:** federal
**Industries:** Information Technology
**Published:** November 09, 2026

### Government Entities
- U.S. Department of Energy (DOE)
- DOE Office of Science
- Brookhaven National Laboratory
- Lawrence Berkeley National Laboratory (Berkeley Lab)

### Sources
- [DOE Backs Pilot on Chip Lithography & Metrology Research](https://www.executivegov.com/articles/doe-labs-ny-creates-semiconductor-development) - ExecutiveGov