Texas A&M University 28-EQUI-ITB-1550

UV-Ozone Cleaning System

The buyer is Texas A&M University, specifically through its procurement contact Danielle Toler. The award is for a UV-Ozone Cleaning System including a step-down transformer, ozone decomposition unit (ozone killer), 2 micron particle filters, and a valve manifold for oxygen and nitrogen. The system supports substrates up to 150 mm diameter and can process various wafer sizes. Key features include a 110 W low pressure mercury UV light source, silent discharge ozone generator, PID temperature controller up to 300°C, oxygen flow meter, digital timer, automatic purge cycle, and no ozone leakage. Additional awarded items include a ramp to setpoint temperature controller, one day installation and on-site training, and shipping costs. Vendors bidding equivalents must provide manufacturer, model number, and detailed specifications for agency approval. The contract requires a minimum 12-month warranty covering parts and labor, certificate of insurance prior to work at any Texas A&M System location, and compliance with export control notifications. Shipping terms are FOB Destination to College Station, TX. The agency will consider best value factors including quality, delivery time, and vendor reputation.

Description

Invitation for Bid for a UV-Ozone Cleaning System. The system must provide features including ozone generation from pure oxygen, ozone killer, heated stage up to 300C, no ozone leakage, and cleaning capability for materials. Brand and model specified are illustrative; equivalents may be considered with detailed specifications. Warranty for 12 months after delivery and acceptance is required. Shipping FOB Destination to College Station, TX. Payment terms Net 30.

View original record