Texas A&M University 28-EQUI-ITB-1526

Sputtering System

The buyer is Texas A&M University, specifically referenced through contact Danielle Toler. The awarded products include a sputtering system capable of depositing highly doped ScAIN, specifically the Evatec AG Sputtering System CLN200E VTM1 with MSQ-Module for 8 wafers, along with several related components: an additional DC-cathode ARQ81 for multisource, a chuck upgrade for RF-bias including RF-matching and power supply, substrate carriers for Si-wafers with 4 and 6 pockets respectively, and a 3 Hole Shutter (part number 210569). Shipping is FOB Destination to College Station, TX. Vendors bidding equivalents must provide manufacturer, model number, and detailed specifications for equivalency determination. Warranty requirements include a minimum 12-month warranty covering parts and labor. Export control notifications are required if applicable. The contract emphasizes best value criteria including quality, delivery time, and vendor capability. The period of performance includes installation, process setup, final acceptance, site acceptance testing, and level 1 & 2 operation and maintenance training at the customer site. The primary OEM mentioned is Evatec AG. The delivery location is College Station, TX, within Brazos County. No service line items were awarded.

Description

Invitation for Bid for a sputtering system capable of depositing highly doped ScAIN (with up to 30% Sc doping) with minimal or no crystal defects. Brand and model specified are Evatec AG Sputtering System CLN200E. Equivalents may be considered. Includes transport system, control system, support system, documentation, factory acceptance test, installation, process set-up, final acceptance, site acceptance testing, and training.

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