Colorado FOIA #1001987265

1 Ibsen Uniform Phase mask, +/- 1. order principle Grating period: 700.00 nm Grating period accuracy and uniformity: ...

Description

1 Ibsen Uniform Phase mask, +/- 1. order principle Grating period: 700.00 nm Grating period accuracy and uniformity: +/- 0.01 nm Grating size: 10 mm x 10 mm Substrate size: 30 mm x 25 mm x 1 mm Optimized for 197 nm TM illumination 0. order: << 3%; 1 Ibsen Uniform Phase mask, +/- 1. order principle Grating period: 1600.00 nm Grating period accuracy and uniformity: +/- 0.01 nm Grating size: 10 mm x 10 mm Substrate size: 30 mm x 25 mm x 1 mm Optimized for 197 nm TM illumination 0. order: << 3%; 1 Ibsen Uniform Phase mask, +/- 1. order principle Grating period: 1200.00 nm Grating period accuracy and uniformity: +/- 0.01 nm Grating size: 10 mm x 10 mm Substrate size: 30 mm x 25 mm x 1 mm Optimized for 197 nm TM illumination 0. order: << 3%