Award
Texas A&M University 28-EQUI-ITB-1278
PlasmaPro 100 Estrelas
Recipient
Not Specified
Awarded
October 14, 2022
Identifier
28-EQUI-ITB-1278
The buyer is Texas A&M University, specifically referenced through contact Mary Williams and the Texas A&M Engineering Experiment Station (TEES) terms and conditions. The awarded vendor is not explicitly named in the document. The award includes the purchase of a PlasmaPro 100 Estrelas Plasma Etch/Deposition System with a base unit configured for 208V 60Hz 3-phase supply, floor fixing brackets, a 15m process chamber cable, LF bias 300W generator and amu for etch, RF 600W generator and amu match for etch, and an Estrelas 5kW plasma source as per Quote Q040. The quantity awarded is one unit. Additional awarded services include commissioning and training, a 12-month warranty covering all parts and labor after final acceptance, and shipping costs which must be included in the bid price. Unique contract requirements include a strict warranty of at least 12 months, no substitution of manufacturer allowed to ensure compatibility, notification requirements for export-controlled items, and shipping terms FOB Destination to College Station, TX. The contract is under federal funding administered by a state agency, and best value considerations include quality, availability, bidder reputation, and future maintenance capabilities.
Description
Plasma Etch/Deposition System